Maximization of Material Removal Rate in Oxide-CMP using Particle Swarm Optimization
نویسندگان
چکیده
Oxide CMP process is used in wafer fabrication to polish dielectric films. At the advance technology nodes, due to the complexity in the circuit design, CMP requirement has increased tremendously. Pattern density variations inside the die area increase especially in the big die size codes. It creates challenges for within die uniformity. Developing a cost effective process required high polish rate. But it is very challenging to develop a high polish rate process with low surface non uniformity. In this work, a methodology is explained to maximize the polish rate by using mathematical optimization technique. Material removal rate optimization is being done within the required non uniformity.
منابع مشابه
A Relative Assessment of Algorithms in Optimising the Influence of Process Parameters on Turning Process of Grey Cast Iron
Grey cast iron of the grade ASTM 48 is in the use for manufacturing casting parts with low or middle duty or load, such as various stove parts, gas burners, boiler parts, protective cover, hand wheel, brackets, base plate, crane balls, counter weight, handle, machine base etc. The production volume rate is mainly lies with the material removal rate during machining process and this is essential...
متن کاملA Multi-Objective Particle Swarm Optimization for Mixed-Model Assembly Line Balancing with Different Skilled Workers
This paper presents a multi-objective Particle Swarm Optimization (PSO) algorithm for worker assignment and mixed-model assembly line balancing problem when task times depend on the worker’s skill level. The objectives of this model are minimization of the number of stations (equivalent to the maximization of the weighted line efficiency), minimization of the weighted smoothness index and minim...
متن کاملSolving a new bi-objective model for a cell formation problem considering labor allocation by multi-objective particle swarm optimization
Mathematical programming and artificial intelligence (AI) methods are known as the most effective and applicable procedures to form manufacturing cells in designing a cellular manufacturing system (CMS). In this paper, a bi-objective programming model is presented to consider the cell formation problem that is solved by a proposed multi-objective particle swarm optimization (MOPSO). The model c...
متن کاملSuppressing Vibration In A Plate Using Particle Swarm Optimization
In this paper a mesh-free model of the functionally graded material (FGM) plate is presented. The piezoelectric material as a sensor and actuator has been distributed on the top and bottom of the plate, respectively. The formulation of the problem is based on the classical laminated plate theory (CLPT) and the principle of virtual displacements. Moreover, the Particle Swarm optimization (PSO) ...
متن کاملUsing Modular Pole for Multi-Objective Design Optimization of a Linear Permanent Magnet Synchronous Motor by Particle Swarm Optimization (PSO)
In this paper particle swarm optimization (PSO) is used for a design optimization of a linear permanent magnet synchronous motor (LPMSM) considering ultra low thrust force ripples, low magnet consumption, improved efficiency and thrust. The influence of PM material is discussed, too and the modular poles are proposed to achieve the best characteristic. PM dimensions and material, air gap and mo...
متن کامل